【論文】Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Fatima Jenina Arellano, Minoru Kusaba, Stephen Wu, Ryo Yoshida, Zoltán Donkó, Peter Hartmann, Tsanko V. Tsankov, Satoshi Hamaguchi
“Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra”
Science and Technology A 42, 053001 (2024)
DOI: 10.1116/6.0003731